chemical

Chemicals for CVD Applications

Precisely designed to your process

The DOCK/CHEMICALS Solutions include a wide range of process chemicals for CVD applications. Please find an extraction below. If you’re looking for a special solution, don’t hesitate to contact us.


  • MOCVD Precursors III/V – Compounds

    As – Arsines

    TBAs

    Tertiarybutylarsine (» PDF)

    TMAs

    Trimethylarsine

    DETBAs

    Diethyltertiarybutylarsine

    P – Phosphines

    TBP

    Tertiarybutylphosphine (» PDF)

    DETBUP

    Diethyltertiarybutylphosphine

    N – Hydrazines

    TBHy

    Tertiarybutylhydrazine

    UDMHy

    Dimethylhydrazine

    Sb – Antimonides

    TMSb

    Trimethylantimony

    TESb

    Triethylantimony

    Bi – Bismuth

    TMBi

    Trimethylbismuth

    B – Boron

    TEB

    Triethylboron

    TTBB

    Tritertiarybutylboron

    Al – Aluminium

    TMAl

    Trimethylaluminum

    TTBAl

    Tris(tertiarybutyl)aluminium

    Ga – Gallium

    TMGa

    Trimethylgallium

    TEGa

    Triethylgallium

    TTBGa

    Tritertiarybutylgallium

    In – Indium

    TMIn

    Trimethylindium

    DADI

    Dimethylaminopropyl-dimethyl-indium

  • MOCVD Precursors II/VI – Compounds

    S – Sulphides

    DTBS

    Ditertiarybutylsulphide

    Se – Selenides

    DiPSe

    Diisopropylselenide

    Cd – Cadmium

    DMCd

    Dimethylcadmium

  • MOCVD Precursors Dopants

    C – Carbon

    CTBr

    Carbontetrabromide

    CCl3Br

    Carbontrichloridebromide

    Si – Silane

    DTBSi

    Ditertiarybutylsilane

    Fe – Iron

    CP2Fe

    Ferrocene

    Zn – Zinc

    DMZn

    Dimethylzinc

    DEZn

    Diethylzinc

    Te – Tellurium

    DETe

    Diethyltellurium

  • MOCVD Precursors Etching Materials

    Cl – Chlorine

    TBCl

    Tertiarybutylchloride

Chemicals for CVD Applications

Precisely designed to your process

The DOCK/CHEMICALS Solutions include a wide range of process chemicals for CVD applications. Please find an extraction below. If you’re looking for a special solution, don’t hesitate to contact us.


  • CVD-Sources

    Chromium (Cr)

    CP2Cr

    Bis(cyclopentadienyl)chromium

    Hafnium (Hf)

    TDEAHf

    Tetrakis(diethylamino)hafnium

    Manganese (Mn)

    MCP2Mn

    Bis(methylcyclopentadienyl)manganese

    Silicon (Si)

    TDMAS

    Tetrakis(dimethylamino)silane

    Tantalum (Ta)

    TBTDET

    (Tert-butylimino)tris(diethylamino)tantalum

    Titanium (Ti)

    TDMAT

    Tetrakis(dimethylamino)titanium

    Tungsten (W)

    BTBMW

    Bis(tert-butylimido)bis(dimethylamido)tungsten

    Zirconium (Zr)

    TDEAZ

    Tetrakis(diethylamino)zirconium

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CONTACT US

Tomoe Transtech Specialty Gases Pte Ltd

8 Boon Lay Way,
8@Tradehub21, #02-01,
Singapore 609964.

Phone +65-6563-2083
Fax +65-6563-1945
Email [email protected]